Issued Patents 2004
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821409 | Electroetching methods and systems using chemical and mechanical influence | Bulent M. Basol, Cyprian Emeka Uzoh, Paul Lindquist | 2004-11-23 |
| 6815354 | Method and structure for thru-mask contact electrodeposition | Cyprian Emeka Uzoh, Bulent M. Basol | 2004-11-09 |
| 6797132 | Apparatus for plating and polishing a semiconductor workpiece | Cyprian Emeka Uzoh | 2004-09-28 |
| 6780772 | Method and system to provide electroplanarization of a workpiece with a conducting material layer | Cyprian Emeka Uzoh, Bulent M. Basol | 2004-08-24 |
| 6777338 | Edge and bevel cleaning process and system | Jalal Ashjaee, Rimma Volodarsky, Cyprian Emeka Uzoh, Bulent M. Basol | 2004-08-17 |
| 6773576 | Anode assembly for plating and planarizing a conductive layer | Rimma Volodarsky, Konstantin Volodarsky, Cyprian Emeka Uzoh, Douglas W. Young | 2004-08-10 |
| 6722946 | Advanced chemical mechanical polishing system with smart endpoint detection | Bulent M. Basol | 2004-04-20 |
| 6695962 | Anode designs for planar metal deposits with enhanced electrolyte solution blending and process of supplying electrolyte solution using such designs | Cyprian Emeka Uzoh, Bulent M. Basol | 2004-02-24 |
| 6692588 | Method and apparatus for simultaneously cleaning and annealing a workpiece | Cyprian Emeka Uzoh | 2004-02-17 |
| 6676822 | Method for electro chemical mechanical deposition | — | 2004-01-13 |