Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835417 | Method and device for depositing thin layers via ALD/CVD processes in combination with rapid thermal processes | Annette Saenger, Harald Seidl, Thomas Hecht, Martin Gutsche | 2004-12-28 |
| 6806037 | Method for producing and/or renewing an etching mask | Matthias Goldbach, Thomas Hecht | 2004-10-19 |
| 6800898 | Integrated circuit configuration and method of fabricating a dram structure with buried bit lines or trench capacitors | Annalisa Cappelani, Josef Willer | 2004-10-05 |
| 6797613 | Process for depositing WSix layers on a high topography with a defined stoichiometry | Annette Sanger, Georg Schulze-Icking | 2004-09-28 |
| 6774005 | Method for fabricating a metal carbide layer and method for fabricating a trench capacitor containing a metal carbide | Martin Gutsche, Peter Moll, Annette Sanger, Harald Seidl | 2004-08-10 |
| 6674113 | Trench capacitor and method for manufacturing the same | Matthias Goldbach, Thomas Hecht, Jorn Lutzen | 2004-01-06 |