Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835417 | Method and device for depositing thin layers via ALD/CVD processes in combination with rapid thermal processes | Bernhard Sell, Harald Seidl, Thomas Hecht, Martin Gutsche | 2004-12-28 |
| 6821187 | Method for chemical-mechanical polishing of a layer which is a substrate and is a metal selected from a platinum group | Gerhard Beitel, Gerd Mainka, Rainer Florian Schnabel | 2004-11-23 |
| 6767581 | Process for the deposition of thin layers by chemical vapor deposition | — | 2004-07-27 |