Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835417 | Method and device for depositing thin layers via ALD/CVD processes in combination with rapid thermal processes | Annette Saenger, Bernhard Sell, Thomas Hecht, Martin Gutsche | 2004-12-28 |
| 6774005 | Method for fabricating a metal carbide layer and method for fabricating a trench capacitor containing a metal carbide | Martin Gutsche, Peter Moll, Bernhard Sell, Annette Sanger | 2004-08-10 |
| 6693016 | Method of fabricating a trench-structure capacitor device | Martin Gutsche, Thomas Hecht, Matthias Leonhardt, Uwe Schroder | 2004-02-17 |