Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835417 | Method and device for depositing thin layers via ALD/CVD processes in combination with rapid thermal processes | Annette Saenger, Bernhard Sell, Harald Seidl, Martin Gutsche | 2004-12-28 |
| 6821861 | Method for fabricating an electrode arrangement for charge storage | Matthias Goldbach | 2004-11-23 |
| 6806037 | Method for producing and/or renewing an etching mask | Matthias Goldbach, Bernhard Sell | 2004-10-19 |
| 6693016 | Method of fabricating a trench-structure capacitor device | Martin Gutsche, Matthias Leonhardt, Uwe Schroder, Harald Seidl | 2004-02-17 |
| 6674113 | Trench capacitor and method for manufacturing the same | Matthias Goldbach, Jorn Lutzen, Bernhard Sell | 2004-01-06 |