Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821861 | Method for fabricating an electrode arrangement for charge storage | Thomas Hecht | 2004-11-23 |
| 6812094 | Method for roughening a surface of a semiconductor substrate | Annalisa Cappellani | 2004-11-02 |
| 6806037 | Method for producing and/or renewing an etching mask | Thomas Hecht, Bernhard Sell | 2004-10-19 |
| 6780337 | Method for trench etching | Peter Moll | 2004-08-24 |
| 6746880 | Method for making electrical contact with a rear side of a semiconductor substrate during its processing | Albert Birner, Martin Franosch, Volker Lehmann, Jorn Lutzen | 2004-06-08 |
| 6674113 | Trench capacitor and method for manufacturing the same | Thomas Hecht, Jorn Lutzen, Bernhard Sell | 2004-01-06 |