Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835612 | Method for fabricating a MOSFET having a very small channel length | Ludwig Dittmar, Dirk Schumann | 2004-12-28 |
| 6812094 | Method for roughening a surface of a semiconductor substrate | Matthias Goldbach | 2004-11-02 |