Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6746880 | Method for making electrical contact with a rear side of a semiconductor substrate during its processing | Albert Birner, Matthias Goldbach, Volker Lehmann, Jorn Lutzen | 2004-06-08 |