Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821187 | Method for chemical-mechanical polishing of a layer which is a substrate and is a metal selected from a platinum group | Gerhard Beitel, Annette Saenger, Rainer Florian Schnabel | 2004-11-23 |