Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6784445 | Apparatus for monitoring intentional or unavoidable layer depositions and method | Jürgen Ziegler, Reinhold Waller, Lothar Pfitzner, Claus Schneider, Heiner Ryssel | 2004-08-31 |
| 6745637 | Self-supporting adaptable metrology device | Detlef Gerhard, Johannes Lechner, Eckhard Marx | 2004-06-08 |
| 6732855 | Conveying element and conveyor means for conveying wafer receptacles, and method | Michael Lering, Clinton Haris | 2004-05-11 |