Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6784445 | Apparatus for monitoring intentional or unavoidable layer depositions and method | Jürgen Ziegler, Reinhold Waller, Claus Schneider, Heiner Ryssel, Volker Tegeder | 2004-08-31 |
| 6724475 | Apparatus for rapidly measuring angle-dependent diffraction effects on finely patterned surfaces | Norbert Benesch, Claus Schneider | 2004-04-20 |