Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6784445 | Apparatus for monitoring intentional or unavoidable layer depositions and method | Reinhold Waller, Lothar Pfitzner, Claus Schneider, Heiner Ryssel, Volker Tegeder | 2004-08-31 |