Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6784445 | Apparatus for monitoring intentional or unavoidable layer depositions and method | Jürgen Ziegler, Lothar Pfitzner, Claus Schneider, Heiner Ryssel, Volker Tegeder | 2004-08-31 |
| 6687015 | Method and device for measuring the thickness of a layer | Ralf Schnupp | 2004-02-03 |