Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6791074 | Light curtain system for establishing a protective light curtain, tool and system for processing objects and method for loading/unloading a tool | Sven Hahn, Mathias Schulz | 2004-09-14 |
| 6732855 | Conveying element and conveyor means for conveying wafer receptacles, and method | Volker Tegeder, Clinton Haris | 2004-05-11 |