Issued Patents 2004
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800407 | Method for experimentally verifying imaging errors in photomasks | Gunther Czech, Ulrich Scheler, Michael Sebald | 2004-10-05 |
| 6746821 | Method of structuring a photoresist layer | Michael Sebald | 2004-06-08 |
| 6746827 | Process for structuring a photoresist layer | Michael Sebald | 2004-06-08 |
| 6746828 | Process for structuring a photoresist layer | Michael Sebald | 2004-06-08 |
| 6743572 | Method for structuring a photoresist layer | Michael Sebald | 2004-06-01 |
| 6740475 | Method for structuring a photoresist layer | Michael Sebald | 2004-05-25 |
| 6703190 | Method for producing resist structures | Klaus Elian, Stefan Hien, Michael Sebald | 2004-03-09 |
| 6696208 | Method for experimentally verifying imaging errors in optical exposure units | Gunther Czech, Ulrich Scheler, Michael Sebald | 2004-02-24 |