Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800407 | Method for experimentally verifying imaging errors in photomasks | Gunther Czech, Ernst-Christian Richter, Michael Sebald | 2004-10-05 |
| 6696208 | Method for experimentally verifying imaging errors in optical exposure units | Gunther Czech, Ernst-Christian Richter, Michael Sebald | 2004-02-24 |