Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800407 | Method for experimentally verifying imaging errors in photomasks | Ernst-Christian Richter, Ulrich Scheler, Michael Sebald | 2004-10-05 |
| 6696208 | Method for experimentally verifying imaging errors in optical exposure units | Ernst-Christian Richter, Ulrich Scheler, Michael Sebald | 2004-02-24 |
| 6686098 | Lithography method and lithography mask | Christoph Friedrich, Carsten Fülber, Rainer Käsmaier, Dietrich Widmann | 2004-02-03 |