Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821706 | Polymerizable composition, polymer, resist, and process for electron beam lithography | Rafael Abargues | 2004-11-23 |
| 6703190 | Method for producing resist structures | Stefan Hien, Ernst-Christian Richter, Michael Sebald | 2004-03-09 |
| 6686131 | Method of producing biocompatible structures and biocompatible microchip | — | 2004-02-03 |