Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6730445 | Attenuated embedded phase shift photomask blanks | Marie Angelopoulos, Katherina Babich, S. Jay Chey, Michael S. Hibbs, Robert N. Lang +1 more | 2004-05-04 |
| 6696205 | Thin tantalum silicon composite film formation and annealing for use as electron projection scatterer | Cameron Brooks | 2004-02-24 |
| 6682860 | Attenuated embedded phase shift photomask blanks | Marie Angelopoulos, Katherina Babich, S. Jay Chey, Michael S. Hibbs, Robert N. Lang +1 more | 2004-01-27 |