Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825480 | Charged particle beam apparatus and automatic astigmatism adjustment method | Masahiro Watanabe, Hiroyuki Shinada, Masami Iizuka, Yasuhiro Gunji, Kouichi Hayakawa +1 more | 2004-11-30 |
| 6797954 | Patterned wafer inspection method and apparatus therefor | Hiroyuki Shinada, Yusuke Yajima, Hisaya Murakoshi, Masaki Hasegawa, Mari Nozoe +4 more | 2004-09-28 |
| 6768113 | WORKPIECE HOLDER, SEMICONDUCTOR FABRICATING APPARATUS, SEMICONDUCTOR INSPECTING APPARATUS, CIRCUIT PATTERN INSPECTING APPARATUS, CHARGED PARTICLE BEAM APPLICATION APPARATUS, CALIBRATING SUBSTRATE, WORKPIECE HOLDING METHOD, CIRCUIT PATTERN INSPECTING METHOD, AND CHARGED PARTICLE BEAM APPLICATION METHOD | Hiroyuki Suzuki, Hiroyuki Shinada, Yasutsugu Usami, Shuji Sugiyama | 2004-07-27 |
| 6700122 | Wafer inspection system and wafer inspection process using charged particle beam | Miyako Matsui, Mari Nozoe | 2004-03-02 |