Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6753524 | Inspection system and inspection process for wafer with circuit using charged-particle beam | Mari Nozoe | 2004-06-22 |
| 6700122 | Wafer inspection system and wafer inspection process using charged particle beam | Mari Nozoe, Atsuko Takafuji | 2004-03-02 |