Issued Patents 2004
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6780245 | Method and apparatus of producing thin film of metal or metal compound | Kuniaki Horie | 2004-08-24 |
| 6776919 | Method and apparatus for etching ruthenium films | Haruko Ohno, Ichiro Katakabe, Sachiko Kihara | 2004-08-17 |
| 6745784 | Method of and apparatus for cleaning substrate | Ichiro Katakabe, Shinya Morisawa, Haruko Ohno, Sachiko Kihara | 2004-06-08 |
| 6743395 | Composite metallic ultrafine particles and process for producing the same | Hiroshi Nagasawa, Kaori Kagoshima, Makiko Emoto | 2004-06-01 |
| 6740242 | Plating apparatus and method of managing plating liquid composition | Hiroshi Nagasawa | 2004-05-25 |
| 6730596 | Method of and apparatus for forming interconnection | Kuniaki Horie, Naoaki Ogure, Takao Kato, Akihisa Hongo, Hiroshi Nagasawa | 2004-05-04 |
| 6709555 | Plating method, interconnection forming method, and apparatus for carrying out those methods | Naoaki Ogure, Hiroshi Nagasawa | 2004-03-23 |