Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6776919 | Method and apparatus for etching ruthenium films | Akira Fukunaga, Haruko Ohno, Sachiko Kihara | 2004-08-17 |
| 6745784 | Method of and apparatus for cleaning substrate | Shinya Morisawa, Haruko Ohno, Sachiko Kihara, Akira Fukunaga | 2004-06-08 |