Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6780245 | Method and apparatus of producing thin film of metal or metal compound | Akira Fukunaga | 2004-08-24 |
| 6730596 | Method of and apparatus for forming interconnection | Akira Fukunaga, Naoaki Ogure, Takao Kato, Akihisa Hongo, Hiroshi Nagasawa | 2004-05-04 |