Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6781673 | Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby | Johannes Hubertus Josephina Moors, Vadim Yevgenyevich Banine, Martinus Hendrikus Antonius Leenders, Henri Gerard Cato Werij, Hugo Matthieu Visser +4 more | 2004-08-24 |
| 6753945 | Transfer method for a mask or substrate, storage box, apparatus adapted for use in such method, and device manufacturing method including such a transfer method | Gert-Jan Heerens, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Robert Gabriël Maria Lansbergen | 2004-06-22 |