Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831736 | Method of and apparatus for line alignment to compensate for static and dynamic inaccuracies in scanning | Rami Elichai, Gilad Schwartz, Pavel Margulis, Igor Slobodnik | 2004-12-14 |
| 6809808 | Wafer defect detection system with traveling lens multi-beam scanner | Haim Feldman, Emanuel Elyasaf, Nissim Elmaliach, Boris Golberg, Silviu Reinhorn | 2004-10-26 |