Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6809808 | Wafer defect detection system with traveling lens multi-beam scanner | Haim Feldman, Emanuel Elyasaf, Nissim Elmaliach, Ron Naftali, Silviu Reinhorn | 2004-10-26 |
| 6750436 | Focus error detection apparatus and method having dual focus error detection path | Haim Feldman, Alexander Libinson | 2004-06-15 |