Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6817923 | Chemical mechanical processing system with mobile load cup | — | 2004-11-16 |
| 6811470 | Methods and compositions for chemical mechanical polishing shallow trench isolation substrates | Benjamin A. Bonner, Anand N. Iyer, Deepak Kumar, Thomas H. Osterheld, Wei-Yung Hsu +2 more | 2004-11-02 |