Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6790326 | Magnetron for a vault shaped sputtering target having two opposed sidewall magnets | Umesh M. Kelkar, Jianming Fu, Praburam Gopalraja | 2004-09-14 |
| 6723214 | Apparatus for improved power coupling through a workpiece in a semiconductor wafer processing system | Bradley O. Stimson, Mitsuhiro Kaburaki, John C. Forster, Eric Delaurentis, Praburam Gopalraja +1 more | 2004-04-20 |