Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6822370 | Parallel plate electrostatic actuation of MEMS mirrors | Thor Juneau, James Doscher | 2004-11-23 |
| 6703679 | Low-resistivity microelectromechanical structures with co-fabricated integrated circuit | Mark Alan Lemkin, Thor Juneau, Allen W. Roessig | 2004-03-09 |
| 6674383 | PWM-based measurement interface for a micro-machined electrostatic actuator | David Horsley, Robert Conant | 2004-01-06 |