Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6822370 | Parallel plate electrostatic actuation of MEMS mirrors | William A. Clark, James Doscher | 2004-11-23 |
| 6703679 | Low-resistivity microelectromechanical structures with co-fabricated integrated circuit | Mark Alan Lemkin, William A. Clark, Allen W. Roessig | 2004-03-09 |