Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6822370 | Parallel plate electrostatic actuation of MEMS mirrors | William A. Clark, Thor Juneau | 2004-11-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6822370 | Parallel plate electrostatic actuation of MEMS mirrors | William A. Clark, Thor Juneau | 2004-11-23 |