Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6703679 | Low-resistivity microelectromechanical structures with co-fabricated integrated circuit | Mark Alan Lemkin, William A. Clark, Thor Juneau | 2004-03-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6703679 | Low-resistivity microelectromechanical structures with co-fabricated integrated circuit | Mark Alan Lemkin, William A. Clark, Thor Juneau | 2004-03-09 |