Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6758983 | Staggered torsional electrostatic combdrive and method of forming same | Jocelyn Nee, Kam-Yin Lau, Richard S. Muller | 2004-07-06 |
| 6674383 | PWM-based measurement interface for a micro-machined electrostatic actuator | David Horsley, William A. Clark | 2004-01-06 |