Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660665 | Platen for electrostatic wafer clamping apparatus | Hiroaki Yanagida, Hideaki Matsubara, Yoshiki Okuhara, Shoji Aoki, Naoki Kawashima +1 more | 2003-12-09 |
| 6624540 | Packaging for automated supply of a brushless motor | Yoshiaki Fukuda, Koji Kuyama, Kazuhito Itakura, Chiaki Yamamoto, Shigeru Yoshida +3 more | 2003-09-23 |
| 6600323 | Sensor for non-contacting electrostatic detector | Jerzy Kieres, Bruce T. Williams | 2003-07-29 |
| 6507197 | Electrostatic force detector with cantilever for an electrostatic force microscope | Akiyoshi Itoh, Katsuji Nakagawa, Manabu Tani, Bruce T. Williams | 2003-01-14 |