Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660665 | Platen for electrostatic wafer clamping apparatus | Hiroaki Yanagida, Hideaki Matsubara, Shoji Aoki, Naoki Kawashima, Bruce T. Williams +1 more | 2003-12-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660665 | Platen for electrostatic wafer clamping apparatus | Hiroaki Yanagida, Hideaki Matsubara, Shoji Aoki, Naoki Kawashima, Bruce T. Williams +1 more | 2003-12-09 |