HY

Hiroaki Yanagida

JC Japan Fine Ceramics Center: 1 patents #1 of 7Top 15%
TR Trek: 1 patents #5 of 14Top 40%
📍 Kashiwa, JP: #14 of 59 inventorsTop 25%
Overall (2003): #209,848 of 273,478Top 80%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6660665 Platen for electrostatic wafer clamping apparatus Hideaki Matsubara, Yoshiki Okuhara, Shoji Aoki, Naoki Kawashima, Bruce T. Williams +1 more 2003-12-09