HM

Hideaki Matsubara

JC Japan Fine Ceramics Center: 1 patents #1 of 7Top 15%
TR Trek: 1 patents #5 of 14Top 40%
📍 Kyoto, JP: #36 of 65 inventorsTop 60%
Overall (2003): #211,878 of 273,478Top 80%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6660665 Platen for electrostatic wafer clamping apparatus Hiroaki Yanagida, Yoshiki Okuhara, Shoji Aoki, Naoki Kawashima, Bruce T. Williams +1 more 2003-12-09