Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660665 | Platen for electrostatic wafer clamping apparatus | Hiroaki Yanagida, Hideaki Matsubara, Yoshiki Okuhara, Shoji Aoki, Naoki Kawashima +1 more | 2003-12-09 |
| 6600323 | Sensor for non-contacting electrostatic detector | Jerzy Kieres, Toshio Uehara | 2003-07-29 |
| D473037 | Infant body wrap | — | 2003-04-15 |
| 6507197 | Electrostatic force detector with cantilever for an electrostatic force microscope | Akiyoshi Itoh, Katsuji Nakagawa, Manabu Tani, Toshio Uehara | 2003-01-14 |