Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6652711 | Inductively-coupled plasma processing system | Jozef Brcka, John Drewery, Michael Grapperhaus, Gerrit J. Leusink, Glyn Reynolds +1 more | 2003-11-25 |
| 6635569 | Method of passivating and stabilizing a Ti-PECVD process chamber and combined Ti-PECVD/TiN-CVD processing method and apparatus | Michael S. Ameen, Joseph T. Hillman, Gert Leusink, Michael G. Ward | 2003-10-21 |
| 6632737 | Method for enhancing the adhesion of a barrier layer to a dielectric | Joseph T. Hillman, Richard Westhoff | 2003-10-14 |
| 6548112 | Apparatus and method for delivery of precursor vapor from low vapor pressure liquid sources to a CVD chamber | Joseph T. Hillman, Kenichi Kubo, Vincent Vezin, Hideaki Yamasaki, Yasuhiko Kojima +2 more | 2003-04-15 |