Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635569 | Method of passivating and stabilizing a Ti-PECVD process chamber and combined Ti-PECVD/TiN-CVD processing method and apparatus | Michael S. Ameen, Gert Leusink, Michael G. Ward, Tugrul Yasar | 2003-10-21 |
| 6632737 | Method for enhancing the adhesion of a barrier layer to a dielectric | Tugrul Yasar, Richard Westhoff | 2003-10-14 |
| 6626186 | Method for stabilizing the internal surface of a PECVD process chamber | Steven P. Caliendo, Gerrit J. Leusink | 2003-09-30 |
| 6586330 | Method for depositing conformal nitrified tantalum silicide films by thermal CVD | Audunn Ludviksson | 2003-07-01 |
| 6562708 | Method for incorporating silicon into CVD metal films | Steven P. Caliendo | 2003-05-13 |
| 6548112 | Apparatus and method for delivery of precursor vapor from low vapor pressure liquid sources to a CVD chamber | Tugrul Yasar, Kenichi Kubo, Vincent Vezin, Hideaki Yamasaki, Yasuhiko Kojima +2 more | 2003-04-15 |
| 6508919 | Optimized liners for dual damascene metal wiring | Thomas J. Licata | 2003-01-21 |