Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6652711 | Inductively-coupled plasma processing system | Jozef Brcka, John Drewery, Michael Grapperhaus, Glyn Reynolds, Mirko Vukovic +1 more | 2003-11-25 |
| 6626186 | Method for stabilizing the internal surface of a PECVD process chamber | Joseph T. Hillman, Steven P. Caliendo | 2003-09-30 |