Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6652711 | Inductively-coupled plasma processing system | Jozef Brcka, Michael Grapperhaus, Gerrit J. Leusink, Glyn Reynolds, Mirko Vukovic +1 more | 2003-11-25 |
| 6620736 | Electrostatic control of deposition of, and etching by, ionized materials in semiconductor processing | — | 2003-09-16 |
| 6537421 | RF bias control in plasma deposition and etch systems with multiple RF power sources | — | 2003-03-25 |
| 6525407 | Integrated circuit package | — | 2003-02-25 |