Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6666982 | Protection of dielectric window in inductively coupled plasma generation | — | 2003-12-23 |
| 6652711 | Inductively-coupled plasma processing system | John Drewery, Michael Grapperhaus, Gerrit J. Leusink, Glyn Reynolds, Mirko Vukovic +1 more | 2003-11-25 |
| 6523493 | Ring-shaped high-density plasma source and method | — | 2003-02-25 |