Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6626186 | Method for stabilizing the internal surface of a PECVD process chamber | Joseph T. Hillman, Gerrit J. Leusink | 2003-09-30 |
| 6562708 | Method for incorporating silicon into CVD metal films | Joseph T. Hillman | 2003-05-13 |