Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6586330 | Method for depositing conformal nitrified tantalum silicide films by thermal CVD | Joseph T. Hillman | 2003-07-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6586330 | Method for depositing conformal nitrified tantalum silicide films by thermal CVD | Joseph T. Hillman | 2003-07-01 |