Issued Patents 2003
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645881 | Method of forming coating film, method of manufacturing semiconductor device and coating solution | Nobuhide Yamada, Rempei Nakata, Makoto Sugiura, Mutsuhiko Yoshioka, Shinji Kobayashi | 2003-11-11 |
| 6633022 | Substrate processing apparatus and substrate processing method | Yuji Matsuyama, Junichi Kitano | 2003-10-14 |
| 6627263 | Film forming apparatus and film forming method | Masateru Morikawa, Masami Akimoto, Kazuhiro Takeshita | 2003-09-30 |
| 6620248 | Coating apparatus and mixing apparatus | Yuji Matsuyama, Junichi Kitano, Hiroyuki Hara | 2003-09-16 |
| 6616760 | Film forming unit | Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita +2 more | 2003-09-09 |
| 6610372 | Method of curing a mixture comprising an ionizing radiation curing resin, and surface modifying technique | Atsushi Nagasawa, Keiji Kubo, Katsuya Fujisawa | 2003-08-26 |
| 6605153 | Coating film forming apparatus | Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita +2 more | 2003-08-12 |
| 6599366 | Substrate processing unit and processing method | Shinji Kobayashi, Yukihiko Esaki, Masateru Morikawa | 2003-07-29 |
| 6585430 | System and method for coating and developing | Yuji Matsuyama, Junichi Kitano | 2003-07-01 |
| 6537373 | Method of forming film and apparatus thereof | Shinji Kobayashi, Yukihiko Esaki, Masateru Morikawa | 2003-03-25 |
| 6536964 | Substrate processing system and substrate processing method | Masami Akimoto, Takafumi Toshimitsu | 2003-03-25 |
| 6518199 | Method and system for coating and developing | Junichi Kitano, Yuji Matsuyama, Hidetami Yaegashi | 2003-02-11 |
| 6514344 | Film forming unit | Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita +2 more | 2003-02-04 |