Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6633022 | Substrate processing apparatus and substrate processing method | Takahiro Kitano, Yuji Matsuyama | 2003-10-14 |
| 6632281 | Substrate processing apparatus and substrate processing method | Yuji Matsuyama | 2003-10-14 |
| 6620248 | Coating apparatus and mixing apparatus | Takahiro Kitano, Yuji Matsuyama, Hiroyuki Hara | 2003-09-16 |
| 6620251 | Substrate processing method and substrate processing apparatus | — | 2003-09-16 |
| 6617095 | Evaluating method of hydrophobic process, forming method of resist pattern, and forming system of resist pattern | Keiko Hada, Yuko Ono, Takayuki Katano, Hidefumi Matsui | 2003-09-09 |
| 6585430 | System and method for coating and developing | Yuji Matsuyama, Takahiro Kitano | 2003-07-01 |
| 6518718 | Speed electromotive force phase control system adapted to low speed | Syunsaku Koga | 2003-02-11 |
| 6518199 | Method and system for coating and developing | Yuji Matsuyama, Takahiro Kitano, Hidetami Yaegashi | 2003-02-11 |
| 6515440 | Departure control system using simulated phase | Syunsaku Koga | 2003-02-04 |