Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6655891 | Substrate treatment system, substrate transfer system, and substrate transfer method | Issei Ueda, Masami Akimoto, Kazuhiko Ito, Mitiaki Matsushita, Masatoshi Kaneda | 2003-12-02 |
| 6633022 | Substrate processing apparatus and substrate processing method | Takahiro Kitano, Junichi Kitano | 2003-10-14 |
| 6632281 | Substrate processing apparatus and substrate processing method | Junichi Kitano | 2003-10-14 |
| 6620248 | Coating apparatus and mixing apparatus | Takahiro Kitano, Junichi Kitano, Hiroyuki Hara | 2003-09-16 |
| 6602382 | Solution processing apparatus | Shuichi Nagamine | 2003-08-05 |
| 6585430 | System and method for coating and developing | Junichi Kitano, Takahiro Kitano | 2003-07-01 |
| 6533864 | Solution processing apparatus and method | Shuichi Nagamine | 2003-03-18 |
| 6518199 | Method and system for coating and developing | Junichi Kitano, Takahiro Kitano, Hidetami Yaegashi | 2003-02-11 |
| 6514570 | Solution processing apparatus and method | Shuichi Nagamine | 2003-02-04 |