Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6655891 | Substrate treatment system, substrate transfer system, and substrate transfer method | Masami Akimoto, Kazuhiko Ito, Mitiaki Matsushita, Masatoshi Kaneda, Yuji Matsuyama | 2003-12-02 |
| 6656281 | Substrate processing apparatus and substrate processing method | Hiroyuki Kudou | 2003-12-02 |